Direct spectral phase function calculation for dispersive interferometric thickness profilometry.
نویسندگان
چکیده
A direct spectral phase function calculation method based on spectral phase shifting is described. We show experimentally that the direct phase function calculation method can provide a simple and fast solution in calculating the spectral phase function, while maintaining the same level of accurate measurement capability as that based on the Fourier transform approach.
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عنوان ژورنال:
- Optics express
دوره 12 21 شماره
صفحات -
تاریخ انتشار 2004